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DIN EN 60204-33 VDE 0113-33:2011-11

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DIN EN 60204-33 VDE 0113-33:2011-11

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified); German version EN 60204-33:2011

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This part of DIN EN 60204 (VDE 0113) applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1000 V for alternating current and not exceeding 1500 V for direct current, and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.

Author VDE
Editor VDE
Document type Standard
Format Paper
ICS 13.110 : Safety of machinery
31.080.01 : Semiconductor devices in general
Number of pages 133
Replace DIN IEC 60204-33 (2006-11)
Cross references EN 60204-33 (2011-03), IDT
Weight(kg.) 0.3261
Year 2011
Document history DIN EN 60204-33 (2011-11)
Country Germany
Keyword DIN EN 60204;EN 60204;EN 60204-33;60204